3D Printing/Flexible Electronics >> EV Group, Austria

EVG 770 – Roll to Roll UV nanoimprint Lithography Stepper

I am interested in this product

Your Name (required)

Your Email (required)

Contact Number

Product Name

Close Form

I am interested in this product

Your Name (required)

Your Email (required)

Contact Number

Product Name

Close Form

Detailed Specs

The EVG770 step and repeat system supports hard and soft UV-NIL as well as micro-contact printing applications. Special system features include a dual-stage alignment approach for excellent overlay, a high-precision wafer stage and a unique imprint head which allows for real time and in-situ characterization of embossing and de-embossing forces of various commercial available resists or anti sticking layers. Additionally, a resist drop dispensing system for viscosities between 1 to several 1,000 mPas which improves the process flexibility for micro- and nano patterning. The EVG770 is abel to imprint in vacuum, which enables superior pattern fidelity, yield, and device performance. The system supports semi- and fully automated wafer and template transfer.