Semiconductor >> IZOVAC, Belarus

Ion Beam Deposition System

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Detailed Specs

Vacuum coating equipment of IZOVAC is designed for precision optical coatings application. Ion-beam sputtering technology is used to achieve stable coatings with low scattering and high laser induced damage threshold (LIDT). Load-lock is used for loading/unloading of the substrates.

Substrate holder is 320 mm. Coating uniformity +/- 0.5%. Coating area -375cm2 .

Vacuum coater Lidiz is equiped with spectral optical control for the 350-1050 nm wavelength range (could be customized).