Semiconductor >> Nano-Master, Inc. USA

Dual Systems – PECVD&Sputter/RIE&PECVD/Sputter&RIE

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Detailed Specs

Nanomaster Dual system is a computer controlled combined systems with a stainless steel cabinet. These systems includes all the necessary process and safety controls, pumps, power supplies, and instrumentation. It is designed with the objectives of ease of use and ease of maintenance, while providing ultimate cleanliness with minimal contamination from virtual leaks, out-gassing, and backstreaming.