Semiconductor & Solar >> JC Nabity, USA

Electron Beam Lithography – Nanometer Pattern Generation System

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Detailed Specs

Required Connections (bold arrows):
Analog XY Inputs; +/-3v to +/-10v range typical, other ranges can be supported; >5k ohms impedance typical, >2k ohm is supported.
Picoammeter; A picoammeter that can read the beam current hitting the sample is required for lithography. Typically, an external picoammeter is connected to the specimen current output from the microscope stage, or less often, a picoammeter will be built into the microscope. In either case, the picoammeter is usually not directly connect to NPGS, although it can be through a optional interface.

Typical Connections (thin arrows):
Image Signal; within +/-10v; used for NPGS Alignment feature.
Blanker; within +/-5v, <200 mA; fast blankers, slow shutters, and systems with no blankers are all supported.

Optional Connections (dashed arrows):
Automated Stage; interface programs for several common automated stages are available at no charge. Any automated stage can be supported, if the serial interface protocol is available.

Digital Microscope Control:
Interface programs for several common digital microscopes are available at no charge. Any digital microscope can be supported, if the serial interface protocol is available.
Faraday Cup & Picoammeter; NPGS can optionally be connected to control a Faraday cup and/or read from a picoammeter, but most systems will have a manually controlled Faraday cup and picoammeter.

System Description:

Software:
NPGS – Version 9.1 (See “”Upgrade History”” for a listing of the most advanced features.)
DesignCAD Express v21.2 (five copies included).
64 bit Windows 10 Pro (when PC is included).

Hardware:
High speed (5 MHz), 16 Bit, high resolution (0.25%) PCIe516 lithography board.
Cables to connect NPGS to microscope.
Optional relay or switch to share microscope input with another accessory, typically an EDX system.
Workstation PC with (or better):
8 GB RAM, 500 Gb Hard Disk, DVDRW Drive.
20″” LCD Monitor.
Wheel Mouse, LAN, USB, Serial Port.