Semiconductor & Solar >> Four Dimensions Inc., USA

Four Point Probe Systems

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Detailed Specs

1. 280PI: This is the most basic model in this series. It can automatically measure 1, 5, and 9 sites and then print the measured data, mean, and range on a 2 1/4 inch tape. The measurement range is 1m /sq. to 800 k /sq.
2. 280PCI: It has the function of 280PI plus ability to display in V/I, ohm-cm, and standard deviation. It stores up to 15 user-defined measurement programs and comes with a small external computer with keypad and LCD display.
3. 280SI: This model is PC controlled with Windows based powerful software which includes. operation administration, recipe set-up, Librarian data storage, increased storage capacity, contour and 3D mapping, trend charts, pn type detection, SECS-II, diagnostics, and many other convenient features.
4. 280SIM: This model is modified from 280SI for increasing the capability to handle wafers up to 230mm in diameter and slug with thickness up to 7mm. Its measurement range is expanded up to 2E6 /sq.
5. 280TSI: It has the same function as 280SI plus temperature compensation.
6. 280TSI: It has the same function as 280TSI, in addition, it has Statistical Process Control (SPC)
7. 280DI: It has the same function as 280SI, but with an extended measurement range up to 8E9 /sq., or 8E11 /sq..
8. Mo280: It has the same function as 280SI plus a junction conductivity measurement, with range from 1E-8 Siemens/cm^2 to 5E-3 Siemens/cm^2.