Semiconductor & Solar >> Denton Vacuum LLC, USA

Ion Beam Sputtering

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    EXCELLENT CONTROL OVER STOICHIOMETRY & FILM THICKNESS
    Denton Vacuum has developed solutions for ion beam sputtering that provide stable deposition rates for excellent film thickness and uniformity control. For details and specifications, take a look at our IBD solutions below.

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      Detailed Specs

      When you need a high-quality film for such demanding applications as optical interference coatings or x-ray mirror optics, the Infinity Ion Beam Deposition System is the solution for you. This pre-configured, end-to-end ion beam deposition (IBD) system that offers options for hardware and monitors, provides stable deposition rates and includes a second ion source for pre-clean and ion-assisted deposition.

      BENEFITS:
      With Infinity, you’ll have good control over film microstructure, stoichiometry and stress through independent control of ion beam energy and flux, letting you deposit a variety of materials. The Infinity also provides excellent control of film thickness and uniformity, for a smooth surface, as a result of its stable deposition rates.

      APPLICATIONS:
      Optical interference coatings
      Encapsulation films
      Interconnects
      Contacts
      Under-bump metallization
      Thin film heads
      X-Ray mirror optics