Semiconductor >> SURFACE & SURFACE systems+technology GmbH & Co. KG

Laser Molecular Beam Epitaxy(MBE)

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Detailed Specs

Surface-tec’s Laser Molecular Beam Epitaxial (MBE) system is a modular solution that grows with your needs. It provides in-vacuum sample and target transfer from a load-lock into the Laser MBE module (Laser MBE essentially is PLD in an UHV-compatible environment). It can be upgraded into our Laser Star cluster system with a central transfer and storage module. Additional vacuum chambers can be attached to this system to allow for different thin film deposition and analysis methods while keeping the samples under UHV conditions.The Main features of SURFACE Laser Molecular Beam Epitaxy (Laser MBE);

– The Laser Molecular Beam Epitaxy (Laser MBE) solution that grows: Start with a Pulsed Laser Deposition(PLD) chamber and a load lock, add more modules later!
– Ultra High vacuum(UHV) Pulsed Laser Deposition(PLD) deposition chamber, Ultra High Vacuum(UHV) transfer of substrates and targets via load-lock
– Modular concept: Easy upgrade to central transfer module and additional modules
– Advanced process automation, perfect also for supperlattice deposition
– Oxygen resistant substrate heater with advanced temperature measurement, 1000°C
– Laser heating of substrate optionally available
– Flexible advanced target manipulator with cross-contamination shielding and target carousel transfer
– Vacuum chamber prepared for system upgrades (RHEED, plasma sources, OES/FTIR,…)
– SURFACE Fluence Control option, for 100% reproducible results
– Fully enclosed beam line for hassle-free, safe operation
– Turn-key delivery
– Advanced online support via internet