Semiconductor & Solar >> Denton Vacuum LLC, USA

Plasma Enhance Chemical Vapour Deposition (PE-CVD)

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Denton Vacuum specializes in plasma-enhanced CVD (PE-CVD) to deposit diamond-like carbon (DLC) thin films. DLC films are a family of amorphous carbon films that exhibit similar properties to diamond, such as hardness, scratch resistance, and high thermal conductivity. In addition, DLC thin film coatings have attracted a lot of commercial interest because of their biocompatibility, infrared transparency, and electrical insulating performance. Denton has developed proprietary capabilities to extend the range of DLC properties to include, for example, anti-fingerprinting and hydrophobicity.

The Voyager is a plasma-enhanced chemical vapor deposition (PE-CVD) system with a focus on diamond-like carbon (DLC) that provides best-in-class flexibility to coat planar (ex. silicon wafers), and three-dimensional parts (ex. optical lenses). The system is configured with Denton’s Process Pro control system, allowing for automated and manual process control.

In addition, there is an optional proprietary chamber configuration to enable co-sputtering of metals during DLC deposition for metal doped DLC (Me-DLC) films. This configuration is unique in the industry and opens up the potential to develop novel DLC films with tailorable mechanical, electrical, and tribological properties.